POD CRAMPING UNIT, LOAD PORT EQUIPPED WITH POD CRAMPING UNIT AND MINI-ENVIRONMENT SYSTEM INCLUDING POD AND LOAD PORT

摘要

A pod cramping unit, a load port with the same, and a mini-environment system including a pod and the load port are provided to prevent the pod from moving away from a support table by restricting the shift of the pod in a direction that a cramp portion is released from a cramped portion when a load is suddenly applied to the pod. A pod cramping unit includes a cramping unit(1) and a restriction unit(2). A cramping mechanism includes a first engagement portion(31) and a second engagement portion(51) provided on a bottom plate(107) of a pod body(106), and the pod cramping unit provided on an FIMS(Front-opening Interface Mechanical Standard) system. The first engagement portion(31) is an element that restricts movement of the pod with respect to the vertically upward direction in which the pod moves away from a support table(119), and the second engagement portion(51) is an element that restricts movement of the pod with respect to the horizontal direction.