Nitriding silicon/the grinding composition and the grinding method silicon dioxide removal speed ratio being high

摘要

This invention, the cation characteristic abrasives, the cation characteristic polymer, offers the inorganic halide salt, and the chemical machine grinding composition which includes the water carrier. This invention the baseplate chemistry furthermore offers the method of grinding mechanically making use of the aforementioned grinding composition. The grinding composition shows the selectivity in order compared to silicon dioxide and polysilicon to remove nitriding silicon.