Jitter correction method and jitter enables correction of the bi-directional scanning scanner in bidirectional scanning scanner

摘要

PROBLEM TO BE SOLVED: To provide a jitter correction method which easily corrects jitters in a two-way scan scanner at a low cost. SOLUTION: A sample for correction data generation where a regular pattern is formed is scanned by laser light; emitted light is detected photoelectrically to generate digital data for correction data generation, and data which minimizes the extent of bias of each scanning line of digital data for correction data generation is determined and stored as jitter correction data on the basis of digital data for correction data generation, and a marked sample is put on a sample stage and is scanned by laser light; and light emitted from the marked material is detected, photoelectrically and jitter correction data stored in a memory is used to perform correction.