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METHOD FOR CORRECTING JITTER IN TWO-WAY SCAN SCANNER, TWO-WAY SCAN SCANNER CAPABLE OF JITTER CORRECTION, AND SAMPLE CARRIER
METHOD FOR CORRECTING JITTER IN TWO-WAY SCAN SCANNER, TWO-WAY SCAN SCANNER CAPABLE OF JITTER CORRECTION, AND SAMPLE CARRIER
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机译:双向扫描扫描仪中抖动校正的方法,具有抖动校正能力的双向扫描仪和样品载体
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摘要
PROBLEM TO BE SOLVED: To provide a jitter correction method which easily corrects jitters in a two-way scan scanner at a low cost. SOLUTION: A sample for correction data generation where a regular pattern is formed is scanned by laser light; emitted light is detected photoelectrically to generate digital data for correction data generation, and data which minimizes the extent of bias of each scanning line of digital data for correction data generation is determined and stored as jitter correction data on the basis of digital data for correction data generation, and a marked sample is put on a sample stage and is scanned by laser light; and light emitted from the marked material is detected, photoelectrically and jitter correction data stored in a memory is used to perform correction.
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