METHOD FOR CORRECTING JITTER IN SCANNER AND SCANNER CAPABLE OF CORRECTING JITTER

摘要

PPROBLEM TO BE SOLVED: To provide a method for correcting jitter in a scanner structured to convert rotation motion of a motor into linear motion so that a sample stage may perform reciprocating. PSOLUTION: In this method for correcting jitter in the scanner, a linear scale is provided whose resolution is lower than that of a rotary encoder, a linear encoder sensor 48 fixed to a substrate detects a black-and-white pattern of the linear scale of a linear encoder 47 fixed to the sample stage to generate analog data. Timing clock of the rotary encoder used to fetch an image supported by a sample is used to threshold process the analog data generated by the linear encoder sensor with the same resolution as that of image data, generating binarized data for correction. Image data generated by an optical detector is corrected on the basis of data about the position of a boundary pixel wherein the threshold processed data for correction changes from 0 to 1 or from 1 to 0. PCOPYRIGHT: (C)2003,JPO