PROCEDURE AND DEPOSIT DEPOSIT FOR RESONANCE PLASMA OF ELECTRONIC CYCLOTRON OF CARBON NANOTUBES OF MONOPARED AND NANOTUBES SO OBTAINED.

摘要

Resonance method for plasma cyclotron resonance of single-wall carbon nanotubes, on a catalyst-free substrate, by injecting a microwave power into a deposit chamber comprising a magnetic structure of magnetic mirror confinement, and at least an electronic cyclotron resonance zone inside or on the edge of said deposit chamber and in front of said substrate, whereby, at a pressure of less than 10 -3 mbar, the dissociation and / or the ionization of a carbon-containing gas in said magnetic mirror in the center of the deposit chamber, producing species that are deposited on said heated substrate; a method in which the surface of the substrate has reliefs and / or depressions, and said reliefs and / or said depressions comprise at least one surface substantially perpendicular to the main plane of the surface of the substrate.