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METHOD AND DEVICE FOR ELECTRONIC CYCLOTRON RESONANCE PLASMA DEPOSIT OF SINGLE-WALL CARBON NANOTUBES AND RESULTING NANOTUBES
METHOD AND DEVICE FOR ELECTRONIC CYCLOTRON RESONANCE PLASMA DEPOSIT OF SINGLE-WALL CARBON NANOTUBES AND RESULTING NANOTUBES
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机译:单壁碳纳米管的电子回旋共振等离子体沉积方法及装置
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摘要
Electron cyclotron resonance plasma deposition process and device for single-wall carbon nanotubes (SWNTs) on a catalyst-free substrate, by injection of microwave power into a deposition chamber comprising a magnetic confinement structure with a magnetic mirror, and at least one electron cyclotron resonance area inside or at the border of the deposition chamber and facing the substrate, whereby dissociation and/or ionization of a gas containing carbon is caused, at a pressure of less than 10SUP-3 /SUPmbars, in the magnetic mirror at the center of the deposition chamber, producing species that will be deposited on said heated substrate. The substrate surface includes raised and/or lowered reliefs. The invention concerns the SWNTs thus obtained.
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