METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION

摘要

A method of helping particle detection and a method of particle detection are provided which make the accurate detection of fine organic particles and inorganic particles possible, such detection having been impossible with the conventional light scattering method. The methods comprise: an adsorption/infiltration step in which an organic gas is brought into contact with organic particles in a semiconductor production step to cause a component of the organic gas to be adsorbed onto and filtrate into the organic particles; a foaming step in which a heated gas is brought into contact with the organic particles having been contacted with the organic gas to thereby foam/expand the organic particles; an organic-particle detection step in which the foamed/expanded organic particles are irradiated with light and the light scattered by the organic particles is received to thereby detect the organic particles; an oxidation step in which inorganic particles and the organic particles are oxidized to thereby decompose the organic particles and expand the inorganic particles; and an inorganic-particle detection step in which the expanded inorganic particles are irradiated with light and the light scattered by the inorganic particles is received to thereby detect the inorganic particles.