METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION

摘要

The present invention provides accurate detection of very small organic particles that are undetectable by conventional light scattering particles and inorganic the enabling provides a method and a secondary particle detecting method for detecting particles. In a semiconductor manufacturing process, by contacting the organic gas in the organic particles, the organic particles and the adsorption step of the adsorption and penetration of the organic gas component in the penetration, by contacting the heated gas in contact with organic particles to which an organic gas, the organic particles irradiation and foaming and expansion of the foaming process, the foaming and expansion, and the light in the organic particles, the organic particles and organic-based detection step of detecting the organic particles by receiving the scattered light from the particles, inorganic particles and the oxidation by the organic particles, with decomposition and also the organic particles, the inorganic oxide and the step of expanding the particles, the light is irradiated to the expanded inorganic particles, and, by receiving the scattered light from the inorganic particles, the inorganic particles inorganic particle detection step of detecting the and a.