首页> 外国专利> METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION

METHOD OF HELPING PARTICLE DETECTION, METHOD OF PARTICLE DETECTION, APPARATUS FOR HELPING PARTICLE DETECTION, AND SYSTEM FOR PARTICLE DETECTION

机译:帮助粒子检测的方法,粒子检测的方法,用于帮助粒子检测的设备和用于粒子检测的系统

摘要

A method of helping particle detection and a method of particle detection include an adsorption/infiltration step where an organic gas is brought into contact with organic particles to cause an organic gas component to be adsorbed and infiltrate to the organic particles; a foaming step where a heated gas is brought into contact with the organic particles contacted with the organic gas to foam/expand the organic particles; and an organic-particle detection step where the foamed/expanded organic particles are irradiated with light and light scattered by the organic particles is received to detect the organic particles. Further, the methods include an oxidation step where inorganic particles and the organic particles are oxidized to decompose the organic particles and expand the inorganic particles; and an inorganic particle detection step where the expanded inorganic particles are irradiated with light and light scattered by the inorganic particles is received to detect the inorganic particles.
机译:帮助颗粒检测的方法和颗粒检测方法包括吸附/渗透步骤,其中使有机气体与有机颗粒接触,以使有机气体成分被吸附并渗透到有机颗粒中。发泡步骤,其中使加热的气体与与有机气体接触的有机颗粒接触以使有机颗粒发泡/膨胀;有机颗粒检测步骤,其中对发泡/膨胀的有机颗粒照射光,并接收由有机颗粒散射的光以检测有机颗粒。此外,该方法包括氧化步骤,其中氧化无机颗粒和有机颗粒以分解有机颗粒并使无机颗粒膨胀。无机粒子检测工序,对所述膨胀的无机粒子照射光,并接受由所述无机粒子散射的光,从而检测所述无机粒子。

著录项

  • 公开/公告号KR20100117622A

    专利类型

  • 公开/公告日2010-11-03

    原文格式PDF

  • 申请/专利权人 TOKYO ELECTRON LIMITED;

    申请/专利号KR20107018825

  • 发明设计人 HAYASHI TERUYUKI;KAWAMURA SHIGERU;

    申请日2009-01-20

  • 分类号G01N15/14;G01N21/47;G01N21/71;G01N21/88;

  • 国家 KR

  • 入库时间 2022-08-21 18:31:41

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