Process of preparation of a membrane comprising micropassages filled with porous material obtained by chemical mechanical polishing

摘要

The method involves producing a micropassage between two main surfaces in an impermeable support (2) e.g. substrate, that is traversed by the micropassage. A main surface (2a) is brought in contact with an aqueous solution comprising suspension particles. Application of pressure (P) is applied between a fabric (4) and the surface (2a) of the support and a relative movement of the fabric and of the surface are simultaneously performed for introducing spherical particles (5) forming porous material in each micropassage. Permeable proton conducting layer is formed on one of the surfaces.