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A COLOR RESIST REMOVER COMPOSITION FOR TFT-LCD PREPARATION

机译:用于TFT-LCD制备的彩色抗蚀剂去除组合物

摘要

A colored resist stripper composition is provided to allow a color filter substrate to be reused by removing a resist pattern and overcovering material within a short time. A colored resist stripper composition comprises 1-20 wt% of a hydroxide compound selected from an inorganic alkali hydroxide, ammonium hydroxide, a C1-C4 alkyl ammonium hydroxide, and a phenylalkyl ammonium hydroxide having a C1-C4 alkyl group; 1-70 wt% of at least one compound selected from an alkylene glycol ether and an alkylene glycol having a C1-C4 alkyl group; 0.5-10 wt% of hydroxylamine; 0.5-50 wt% of an alkoxyalkyl amine; and the balance of water.
机译:提供了有色抗蚀剂剥离剂组合物,以通过在短时间内去除抗蚀剂图案并覆盖材料来使彩色滤光片基板重新使用。着色抗蚀剂剥离剂组合物包含1-20重量%的选自无机碱金属氢氧化物,氢氧化铵,C1-C4烷基氢氧化铵和具有C1-C4烷基的苯基烷基氢氧化铵的氢氧化物; 1-70重量%的至少一种选自亚烷基二醇醚和具有C1-C4烷基的亚烷基二醇的化合物; 0.5-10重量%的羟胺; 0.5-50重量%的烷氧基烷基胺;和水的平衡。

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