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METHOD FOR ADJUSTING PARALLELISM BETWEEN BONDING TOOL AND BONDING STAGE IN BONDING MACHINE

机译:胶合机中胶合工具与胶合阶段之间的平行度调整方法

摘要

A method for controlling parallelism of a bonding tool in a bonding device is provided to reduce the delay of a bonding process by reducing a working time to match the parallelism of the bonding tool and the bonding stage. The parallelism between a bonding tool absorbing a chip and a bonding stage supporting the chip is controlled within the predetermined range. Reference points are set up in the bonding stage and the bonding tool. A distance between the reference position of the bonding tool and the pressured position of the bonding tool is inputted as the reference data by pressurizing an arbitrary reference point of the bonding tool to the preset pressure of the arbitrary reference point of the bonding stage. The distance between the reference position of the bonding tool and the pressured position of the bonding tool is compared with the reference data. The parallelism of the bonding tool and the bonding stage is controlled according to the comparison result.
机译:提供一种用于控制接合装置中的接合工具的平行度的方法,以通过减少使接合工具的平行度与接合台的平行度匹配的工作时间来减少接合过程的延迟。吸收芯片的接合工具与支撑芯片的接合台之间的平行度被控制在预定范围内。在接合阶段和接合工具中设置参考点。通过将焊接工具的任意基准点加压至接合台的任意基准点的预设压力,来输入接合工具的基准位置与接合工具的受压位置之间的距离作为基准数据。将焊接工具的参考位置与焊接工具的受压位置之间的距离与参考数据进行比较。根据比较结果,控制焊接工具和焊接台的平行度。

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