REMOVAL OF OXIDATION LAYER FROM METAL SUBSTRATE AND DEPOSITION OF TITATIUM ADHESION LAYER ON METAL SUBSTRATE

摘要

An oxidation layer is removed from a metal substrate by plasma etching (308). A titanium adhesion layer is deposited on the metal substrate (310). A multiple-layer dielectric is deposited on the titanium adhesion layer (316). The titanium adhesion layer improves adhesion of the multiple-layer dielectric to the metal substrate. ® KIPO & WIPO 2009