METHOD AND DEVICE FOR MEASURING THE AMPLITUDE OF A FREELY OSCILLATING CAPILLARY OF A WIRE BONDER

摘要

measured in a capillary by a light beam (6) of the shielding on the basis dumyeo, and the light beam intensity the number of photons (14) which is measured by the ultrasound the capillary (1) of the amplitude component A of the vibration of the tip which is fixed to the horn (3) that can be applied from the ultrasonic transducer (2) _{Measurement of y} when the capillary is being located at one side of the light beam without the light-shielding the ultrasound beam it is applied to it. The capillaries are moving through the light beam in the step to the next, where, i = 1 to n for each of the steps, the coordinate y _i as well as the DC voltage of the output signal of the number of photons Part U _DC (y _i ) and the alternating voltage portion U _AC (y _i ) is determined, where Coordinate y _i is shown the position of the capillary to the y axis which extends perpendicular to the light beam. Amplitude A _y is calculated from the measured value to the next.