Torsion-spring element for the suspension of deflectable micromechanical elements

摘要

Torsion-spring element with non-linear spring characteristic for the suspension deflectable micromechanical elements, which is held on a suspension and is connected with a micromechanical element, characterized in that a with a fork / branch connected region by means of a changing cross section in the direction of the longitudinal axis of a speed of the moment of resistance and has a fork / branching v - or u - is.