Optical element has partial components connecting intermediate layer provided area by area between partial components, where intermediate layer is formed as inorganic layer and contains silicon oxide bridges

摘要

The optical element (1) is formed of two permanently connected partial components (2,3). The partial components connecting intermediate layer (5) is provided area by area between the partial components. The intermediate layer is formed as inorganic layer and contains the silicon oxide bridges, and runs in a level parallel to the Z-axis. The partial components contain crystalline quartz, lutetium aluminum garnet or neodymium-doped yttrium aluminum garnet. Independent claims are also included for the following: (1) a method for connecting two optical partial components by intermediate layer formed as inorganic layer and containing silicon oxide bridges, where the inorganic intermediate layer is produced using an alkaline solution, which contains potassium hydroxide, lithium hydroxide, or sodium hydroxide (2) a method for monitoring the hardening process of a low temperature bonding layer in an optical element (3) a projection exposure system for the semiconductor lithography (4) a method for connecting two partial components of an optical element at a joint by low temperature bonding method (5) a phase lag element for semiconductor lithography, with an anisotropic crystal plate arranged on a carrier, where anisotropic crystal plate contains silicon oxide, magnesium fluoride, Aluminum oxide or lanthanum fluoride (6) a method for producing a phase lag element (7) a method for permanently connecting two partial components.