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HIGH ATMOSPHERIC PRESSURE PLASMA ASSISTED CVD DEPOSITION DEVICE AND METHOD AND APPLICATIONS THEREOF
HIGH ATMOSPHERIC PRESSURE PLASMA ASSISTED CVD DEPOSITION DEVICE AND METHOD AND APPLICATIONS THEREOF
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机译:高气压等离子辅助CVD沉积装置及其方法和应用
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摘要
A CVD deposition process on a substrate which is conducted at atmospheric pressure, characterized by the fact that it is assisted by a very high frequency plasma produced by a microstrip field applicator. Its use to apply an inorganic layer electrically conductive on automotive body elements, particularly bumpers.
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