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HIGH ATMOSPHERIC PRESSURE PLASMA ASSISTED CVD DEPOSITION DEVICE AND METHOD AND APPLICATIONS THEREOF

机译:高气压等离子辅助CVD沉积装置及其方法和应用

摘要

A CVD deposition process on a substrate which is conducted at atmospheric pressure, characterized by the fact that it is assisted by a very high frequency plasma produced by a microstrip field applicator. Its use to apply an inorganic layer electrically conductive on automotive body elements, particularly bumpers.
机译:在大气压下在基板上进行的CVD沉积工艺,其特征在于它由微带场施加器产生的非常高频率的等离子体辅助。它用于在汽车车身元件(特别是保险杠)上施加可导电的无机层。

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