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Device and Process for Very High-Frequency Plasma-Assisted CVD under Atmospheric Pressure, and Applications Thereof

机译:大气压下高频等离子体辅助CVD的装置和工艺及其应用

摘要

The invention relates to a method for CVD on a substrate under atmospheric pressure, characterized in that it is assisted by a very-high-frequency plasma generated by a field applicator with an elongated conductor of the micro-ribbon or hollow conducting line type. The invention also relates to the use thereof for applying an electrically conductive inorganic layer on elements of vehicle bodywork, particularly the bumpers.
机译:本发明涉及一种在大气压下在衬底上进行CVD的方法,其特征在于,它是由具有微带或空心导线类型的细长导体的,由场施加器产生的非常高频的等离子体辅助的。本发明还涉及其用于在车辆车身的元件,特别是保险杠上施加导电无机层的用途。

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