Synergy Between Plasma-Assisted ALD and Roll-to-Roll Atmospheric Pressure PE-CVD Processing of Moisture Barrier Films on Polymers

著录项

• 来源
  《Plasma processes and polymers》 |2016年第3期|311-315|共5页
• 作者

  Starostin Sergey A.; Keuning Wytze; Schalken Jean‐Paul; Creatore Mariadriana; Kessels Wilhelmus M. M. (Erwin); Bouwstra Jan B.; (Richard) van de Sanden Mauritius C. M.; de Vries Hindrik W.;

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• 作者单位

  Dutch Institute For Fundamental Energy Research (DIFFER) Eindhoven The Netherlands;

  Eindhoven University of Technology Department of Applied Physics Eindhoven The Netherlands;

  Eindhoven University of Technology Department of Applied Physics Eindhoven The Netherlands;

  Eindhoven University of Technology Department of Applied Physics Eindhoven The Netherlands;

  High Tech Campus 5 Solliance Solar Research Eindhoven The Netherlands;

  Eindhoven University of Technology Department of Applied Physics Eindhoven The Netherlands;

  High Tech Campus 5 Solliance Solar Research Eindhoven The Netherlands;

  FUJIFILM Manufacturing Europe B.V. Tilburg The Netherlands;

  Dutch Institute For Fundamental Energy Research (DIFFER) Eindhoven The Netherlands;

  Eindhoven University of Technology Department of Applied Physics Eindhoven The Netherlands;

  Dutch Institute For Fundamental Energy Research (DIFFER) Eindhoven The Netherlands;

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• 收录信息
• 原文格式 PDF
• 正文语种 eng
• 中图分类
• 关键词

  gas permeation; plasma‐assisted atomic layer deposition (PA‐ALD); plasma‐enhanced chemical vapor deposition (PE‐CVD); roll‐to‐roll reactors;

  机译：气体渗透;等离子体辅助原子层沉积（PA-ALD）;等离子体增强化学气相沉积（PE-CVD）;卷对卷反应器;