PROBLEM TO BE SOLVED: To obtain a workpiece with favorable surface roughness by sufficiently holding abrasive grains in an opened granular graphite holes existing at a surface of the surface plate, capable of obtaining a stable polishing force by an increase of the holding force and transferring a fine surface of the surface plate to a polishing workpiece when actually polishing the polishing workpiece by using free abrasive grains.;SOLUTION: This polishing device corrects and polishes a polishing surface plate by disposing carriers for correcting the surface plate having holes for holding grinding wheels for correcting the surface plate on the polishing surface plate, holding the grinding wheels in the holes of the carriers, rotating each of the polishing surface plate and the carrier and supplying free abrasive grains to the polishing surface plate. The shape of the grinding wheel disposed in the hole of the carrier has a fan-shape of 180-90° at a circular center angle.;COPYRIGHT: (C)2010,JPO&INPIT
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