SURFACE TREATMENT AGENT FOR RESIST PATTERN, RESIST COMPOSITION, AND SURFACE TREATMENT METHOD FOR RESIST PATTERN AND FORMATION METHOD FOR RESIST PATTERN BY USE OF THEM

摘要

PROBLEM TO BE SOLVED: To provide a surface treatment agent for a freezing process being applied to the first resist pattern in a double patterning method and satisfying the requirements for preventing line width and LWR of the first resist pattern from fluctuating owing to the freezing process and the formation of the second resist pattern, and also to provide a pattern formation method by use of it.;SOLUTION: This surface treatment agent for the resist pattern contains: polymer and/or oligomer having a nucleophilic functional group; and a solvent.;COPYRIGHT: (C)2010,JPO&INPIT