Method of Forming Fine Silver Conductor Patterns on LTCC Green Sheet Using Photo-Patterned Resist Film

摘要

To enable the miniaturization of Low Temperature Cofired Ceramic (LTCC) devices, the creation of fine conductor patterns on LTCC green sheets has been proposed. Although screen printing has been the most common way of creating conductor patterns on a green sheet, this conventional technology is limited in terms of the minimum dimensions of the patterns that it can be used to form. Instead of screen printing, therefore, this paper proposes an alternative method. After attaching an optically pre-patterned resist film to a LTCC green sheet, a conductor paste is forced through the gaps in the pattern, so as to form the fine conductor patterns. The obtained line width was 30 μm while the height was 25μm.