Substrate transfer apparatus and a substrate processing apparatus using the same, and a substrate transfer method used for them.

摘要

PROBLEM TO BE SOLVED: To provide a substrate transport device where substrate transport time can be shortened, and to provide a substrate processor using the device and a substrate transporting method used for them.;SOLUTION: In a substrate transfer operation of an indexer robot 13 and a center robot 36, an indexer-side upper hand 165 and an indexer side lower hand 175 simultaneously advance to a substrate transfer position S. Thus, processes of the transfer operation can be reduced compared to a case when the indexer side hand 165 and the indexer side lower hand 175 alternately advance and a processed substrate W1 and an unprocessed substrate W2 are transferred. When the indexer side upper hand 165 is caused to precedently reach the substrate transfer position S, a situation that the substrate drops does not occur even if the indexer side upper hand 165 is caused to reach the substrate transfer position S at high advance speed since it is in an empty-handed state.;COPYRIGHT: (C)2006,JPO&NCIPI