New process for transferring PZT thin film onto polymer substrate

摘要

This paper reports a simple, quick and cheap method for transferring Pb(Zr,Ti)O3 (PZT) thin film onto polymer substrate. To achieve a low-cost transfer process, piezoelectric thin film are deposited onto a sacrificial commercial aluminium substrate to target polymer substrate by a wet etching technique. This novel flexible piezoelectric structure was characterized to evaluate its crystal structure and its morphologic properties. This new process should allow to develop novel applications for low frequency vibrations energy harvesting.