PZT Thin Films Deposited on Copper-Coated Polymer Film Substrates

摘要

In this work, we investigate microstructure and composition of nanocrystalline lead-titanium-zirconium oxide thin films reactively sputtered directly on copper-coated polymer films without intentionally substrate heating. Film microstructure characterization was carried out by scanning probe microscopy. Surface topography was described by fractal dimension. Composition analysis was performed by means of X-ray photoelec-tron spectroscopy.