SUBSTRATE TRANSFERRING APPARATUS, SUBSTRATE PROCESSING APPARATUS, SUBSTRATE TRANSFERRING ARM AND SUBSTRATE TRANSFERRING METHOD

摘要

A substrate is transferred and received to and from a discretionary holding plate on a wafer holding boat and a pitch of the holding plates is reduced compared with conventional pitches. A substrate transferring apparatus (300) is provided with a base (310) which is configured to be turned and lifted; a first arm (320), which is arranged to advance and retract to and from the base, with a fork section (322) for placing and transferring a wafer; and a second arm (330), which is arranged to advance and retract to and from the base, with a lifting fork section (332) having a substrate bringing up mechanism (340) which can be stood and laid down.