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The mobile transmitter which possesses the piezoelectric Drive die MEMS component and this piezoelectric Drive die MEMS component
The mobile transmitter which possesses the piezoelectric Drive die MEMS component and this piezoelectric Drive die MEMS component
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机译:具有压电驱动芯片MEMS组件和该压电驱动芯片MEMS组件的移动发射器
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摘要
A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
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