Multi-axis piezoelectric energy harvesting using MEMS components with slanted beams

摘要

DuringthemanufacturingofMEMScomponents,slantedbeamscanbeproducedintheetchingprocess.Weshowthatthiscanbeusedtoproduceskewmotionthatcausesdeflectionofaproofmassoutofthedeviceplanealsowhentheexcitationisconfinedtothedeviceplane.Thisallowsconstructionofanenergyharvesterthatusesaplanarmanufacturingprocessandproducespoweralsowithin-planeexcitation.Toobtainthiswithtraditionalmethodsitwouldbenecessarytomanufactureseparatecomponentsandthenmountthemwiththeirsensitiveaxesorthogonaltoeachother...