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Film Conveyor Apparatus and Roll-to-Roll Vacuum Deposition Method
Film Conveyor Apparatus and Roll-to-Roll Vacuum Deposition Method
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机译:薄膜输送装置及卷对卷真空沉积方法
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摘要
[Object] To enable a deposition area of a base film to be protected and realize stable film traveling performance.;[Solving Means] A roll-to-roll vacuum deposition apparatus according to the present invention includes a guide unit including a guide roller and an auxiliary roller, the guide roller including a pair of annular guide portions that support side edge portions of a base film, the auxiliary roller being opposed to the guide roller and pressing the side edge portions of the base film against the pair of guide portions. As a result, a deposition area of the base film and roll surfaces of the guide roller and auxiliary roller of the guide unit can be prevented from being brought into contact with each other, and the deposition area) can thus be protected.
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