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Film Conveyor Apparatus and Roll-to-Roll Vacuum Deposition Method

机译:薄膜输送装置及卷对卷真空沉积方法

摘要

[Object] To enable a deposition area of a base film to be protected and realize stable film traveling performance.;[Solving Means] A roll-to-roll vacuum deposition apparatus according to the present invention includes a guide unit including a guide roller and an auxiliary roller, the guide roller including a pair of annular guide portions that support side edge portions of a base film, the auxiliary roller being opposed to the guide roller and pressing the side edge portions of the base film against the pair of guide portions. As a result, a deposition area of the base film and roll surfaces of the guide roller and auxiliary roller of the guide unit can be prevented from being brought into contact with each other, and the deposition area) can thus be protected.
机译:[目的]使得能够保护基膜的沉积区域并实现稳定的膜行进性能。[解决方案]根据本发明的卷对卷真空沉积设备包括引导单元,该引导单元包括引导辊和辅助辊,该引导辊包括支撑基膜的侧边缘部分的一对环形引导部分,该辅助辊与该引导辊相对并且将基膜的侧边缘部分压靠在该对引导部分上。结果,可以防止基膜的沉积区域以及引导单元的引导辊和辅助辊的辊表面彼此接触,从而可以保护沉积区域。

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