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Power MOSFET, semiconductor device including the power MOSFET, and method for making the power MOSFET
Power MOSFET, semiconductor device including the power MOSFET, and method for making the power MOSFET
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机译:功率MOSFET,包括该功率MOSFET的半导体器件以及制造该功率MOSFET的方法
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摘要
A metal oxide semiconductor field effect transistor includes a semiconductor substrate; a well region containing an impurity of a first conductivity type disposed on the semiconductor substrate, the well region including a source region and a drain region formed by adding an impurity of a second conductivity type, the source region and the drain region being separated from each other by a predetermined gap; an insulating film disposed on the surface of the well region in the gap between the source region and the drain region; and a gate electrode disposed on the insulating film. The well region is composed of an epitaxial layer, and the epitaxial layer includes an impurity layer of the first conductivity type having a different impurity concentration.
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