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MEMS device and method of reducing stiction in a MEMS device

机译:MEMS装置和减少MEMS装置中的静摩擦的方法

摘要

A MEMS device includes a substrate; a movable mass suspended in proximity to the substrate; and at least one suspension structure coupled to the movable mass for performing a mechanical spring function. The at least one suspension structure has portions that move in tandem when the MEMS device is subject to at least one stimulus in a sensing direction, and further includes at least one link between the portions that move in tandem.
机译:一种MEMS器件,包括衬底;可移动质量块,其悬浮在基板附近;至少一个悬挂结构,其连接到可移动质量块以执行机械弹簧功能。至少一个悬架结构具有当MEMS装置在感测方向上受到至少一个刺激时串联运动的部分,并且还包括在串联运动的部分之间的至少一个连杆。

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