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Suppression of Stiction Force by All-Vapor Processes using HF, Ozone, and HMDS for MEMS Devices

机译：使用HF，臭氧和HMDS对MEMS器件的全蒸汽过程抑制静态力

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Yusuke Taii; Kuniyuki Kakushima; Ryuji Yokokawa; Shiano Ono; Takuji Takahashi; Keiji Isamoto; Changho Chong; Hiroyuki Fujita; Hiroshi Toshiyoshi;
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1. Experimental Investigation Into Stiction Forces and Dynamic Mechanical Anti-Stiction Solutions in Ultra-Clean Encapsulated MEMS Devices [J] . David B. Heinz, Vu A. Hong, Chae Hyuck Ahn, Journal of Microelectromechanical Systems . 2016,第3期

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2. A 'nano-battering ram' for measuring surface forces: obtaining force-distance curves and sidewall stiction data with a MEMS device [J] . W. Merlijn van Spengen, Elco Bakker, Joost W. M. Frenken Journal of Micromechanics and Microengineering . 2007,第7期

机译：用于测量表面力的“纳米撞击撞锤”：使用MEMS装置获得力距曲线和侧壁静力数据
3. On the reliability of electrostatic NEMS/MEMS devices: Review of present knowledge on the dielectric charging and stiction failure mechanisms and novel characterization methodologies [J] . Usama Zaghloul, George Papaioannou, Bharat Bhushan, Microelectronics reliability . 2011,第9a11期

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4. Stiction forces and reduction by dynamic contact in ultra-clean encapsulated MEMS devices [C] . Heinz D.B., Hong V.A., Kimbrell T.S., IEEE International Conference on Micro Electro Mechanical Systems . 2015

机译：超清洁封装的MEMS器件中的静力和动态接触的减少
5. Devices, structures, and processes for optical MEMS. [D] . Choo, Hyuck. 2007

机译：光学MEMS的设备，结构和工艺。
6. Explosion Suppression Mechanism Characteristics of MEMS SA Device With In Situ Synthetic Primer [O] . Hengzhen Feng, Wenzhong Lou, Dakui Wang, 2018

机译：原位合成底漆的MEMS S＆A装置的爆炸机理特性
7. A ‘nano-battering ram ’ for measuring surface forces- Obtaining force-distance curves and sidewall stiction data with a MEMS device [O] . W. Merlijn Van Spengen, Elco Bakker, Joost W. M. Frenken 2008

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Suppression of Stiction Force by All-Vapor Processes using HF, Ozone, and HMDS for MEMS Devices

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