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METHOD AND DEVICE FOR FABRICATING BONDING WIRES ON THE BASIS OF MICROELECTRONIC MANUFACTURING TECHNIQUES

机译:基于微电子制造技术制造接合线的方法和装置

摘要

Bonding wires (252A) for sophisticated bonding applications may be efficiently formed on the basis of a corresponding template device (200) that may be formed on the basis of semiconductor material (201), such as silicon, in combination with associated fabrication techniques, such as lithography and etch techniques. Hence, any appropriate diameter and cross-sectional shape may be obtained with a high degree of accuracy and reliability.
机译:可以在相应的模板装置(200)的基础上有效地形成用于复杂键合应用的键合线(252A),该模板装​​置可以基于诸如硅的半导体材料(201)结合相关的制造技术来形成。作为光刻和蚀刻技术。因此,可以以高度的准确性和可靠性获得任何合适的直径和横截面形状。

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