SUBSTRATE SUPPORT DEVICE AND A SUBSTRATE PROCESSING DEVICE, CAPABLE OF PREVENTING A BODY PART FROM BEING DAMAGED DUE TO THE THERMAL EXPANSION OF A BASE WHILE PREVENTING THE ELECTRIC SHORT OF WIRES

摘要

PURPOSE: A substrate support device and a substrate processing device are provided to prevent the damage to a body by buffering the thermal expansion difference between a support and a tube of the body.;CONSTITUTION: A substrate support device(100) includes a body(10), a support(72), and a buffer unit(75). The body includes a plate embedding a heat electrode and a tube(30) protruded from the lower surface of the plate. A substrate is loaded on the body. The support supports the body. The buffer unit is arranged between the tube of the body and the support and has the expansion rate between the body and the support. An insulator(50,60) is inserted into the tube and has insertion holes into which the wires are inserted for insulating the wires.;COPYRIGHT KIPO 2010