首页> 外国专利> COMPLEMENTARY METAL-OXIDE SEMICONDUCTOR(CMOS) FIELD-EFFECT TRANSISTOR HAVING DUAL WORK FUNCTION GATE AND METHOD OF MANUFACTURING THE SAME

COMPLEMENTARY METAL-OXIDE SEMICONDUCTOR(CMOS) FIELD-EFFECT TRANSISTOR HAVING DUAL WORK FUNCTION GATE AND METHOD OF MANUFACTURING THE SAME

机译:具有双重工作功能门的互补金属氧化物半导体场效应晶体管及其制造方法

摘要

PURPOSE: A CMOS transistor with a dual work function gate and a method for manufacturing the same are provided to reduce at least two steps of a lithography process by forming an NMOS transistor and a PMOS transistor gate symmetrically by spacer etching method. CONSTITUTION: A semiconductor substrate(100) is divided into a first area(140a) and a second area(150a). An NMOS transistor is formed in the first area. A PMOS transistor is formed in the second area. The NMOS transistor includes a first gate pattern(125), a second gate pattern(135), a source/drain area of n-type and an NMOS gate. The first gate pattern and the second gate pattern are in the form of spacer shapes. The source/drain region of n-type is formed in the both side of the NMOS gate of the semiconductor substrate. The PMOS transistor includes a PMOS gate and a source/drain region of p-type formed in the both side of the PMOS gate of the semiconductor substrate.
机译:目的:提供具有双功函数栅极的CMOS晶体管及其制造方法,以通过间隔物蚀刻法对称地形成NMOS晶体管和PMOS晶体管栅极来减少光刻工艺的至少两个步骤。构成:半导体衬底(100)被分为第一区域(140a)和第二区域(150a)。在第一区域中形成NMOS晶体管。在第二区域中形成PMOS晶体管。 NMOS晶体管包括第一栅极图案(125),第二栅极图案(135),n型的源极/漏极区域和NMOS栅极。第一栅极图案和第二栅极图案为间隔物形状的形式。在半导体衬底的NMOS栅极的两侧形成n型的源极/漏极区域。 PMOS晶体管包括PMOS栅极和在半导体衬底的PMOS栅极的两侧形成的p型源/漏区。

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