MANUFACTURING METHOD AND SENSOR ELEMENT MANUFACTURED THEREBY OF SENSOR STRUCTURE HAVING NANO WIRE STRUCTURE OF UNIFORMING IN WHICH NANO DOTS DOES NOT REMAIN BEHIND NANO WIRE ARRANGED WITH PARALLELLY ARRANGED NANO WIRE IS USED

摘要

PURPOSE: A manufacturing method of the sensor structure of using the nano wire arranged with the parallel arranged nano wire and sensor element manufactured thereby is proceed the manufacture and queue of the nano wire through the single process by using terrace. The nano wire structure having uniform-size and interval the process is simplified can be obtained.;CONSTITUTION: It cuts so that the mono crystal substrate. Substrate is the thermal process and terrace is formed. The material forming the nano wire in the substrate in which terrace is formed is evaporated and the nano wire is formed in the edge of terrace. At this time, the shadow mask is arranged at the center of the interval of substrate and target. The production of the nano dot is prevented and the thickness of the nano wire is controlled.;COPYRIGHT KIPO 2010