MANUFACTURING METHOD OF A HIGHLY PURE CUINSE2 THIN FILM AND A CUINSE2 THIN FILM FOR A SOLAR CELL MANUFACTURED BY THE SAME, CAPABLE OF IMPROVING THE PURITY OF A THIN FILM

摘要

PURPOSE: A manufacturing method of a highly pure CuInSe2 thin film and a CuInSe2 thin film for a solar cell manufactured by the same are provided to manufacture a thin film which has a fixed composition ratio despite evaporation under an argon state and a vacuum.;CONSTITUTION: A manufacturing method of a highly pure CuInSe2 thin film comprises following steps. A copper foil is formed on a substrate by depositing asymmetry copper precursor under an argon state and a vacuum through a chemical vapor deposition process. The asymmetry copper precursor including indium-selenium is continuously deposited under a mild condition of 350~450°C temperature in the argon state and a vacuum. The continuous deposition process is enabled over 40 minutes.;COPYRIGHT KIPO 2010