ELECTROSTATIC CHUCK INCLUDING A MULTIPLE ELECTRODE PATTERN, INCLUDING A DESCENT STEP TYPE ELECTRODE AND AN ASCENT STEP TYPE ELECTRODE

摘要

PURPOSE: An electrostatic chuck including a multiple electrode pattern is provided to improve the usage of the electrostatic chuck by forming a plurality of electrode patterns with different poles.;CONSTITUTION: A descent step type electrode and an ascent step type electrode(333) are repeatedly formed on an insulation layer. The descent step type electrode and the ascent step type electrode are spaced apart from each other. A first electrode(350) is formed between the descent step type electrode and the ascent step type electrode and is the same pole as the descent step type electrode and the ascent step type electrode. A second electrode(370) is formed between the first electrode, the descent step type electrode and the ascent step type electrode and is the opposite pole to the first electrode.;COPYRIGHT KIPO 2010