ION REMOVAL DEVICE AND METHOD OF THE RETICLE PREVENTING THE HAZE OF RETICLE

摘要

PURPOSE: An ion removal device and method of reticle eliminate remaining ions existing in the surface of reticle without the damage of pattern. The patterning error by haze is prevented.;CONSTITUTION: With the bath(20) which the ion removal device of reticle crowds with the deionized water. The reticle(22) locating in the inner one-side of bath is included. In reticle, the electric field is formed between one side and the other side putting opposite to one side of bath so that the ion can be deviated. The voltage(30) of the negative principle in nature is formed in one side of bath. The positive voltage(32) is formed in the other side.;COPYRIGHT KIPO 2010