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METHOD OF MANUFACTURING TRANSPARENT CONDUCTIVE AMORPHOUS FILM, AND THE TRANSPARENT CONDUCTIVE AMORPHOUS FILM
METHOD OF MANUFACTURING TRANSPARENT CONDUCTIVE AMORPHOUS FILM, AND THE TRANSPARENT CONDUCTIVE AMORPHOUS FILM
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机译:透明导电性非晶膜的制造方法及透明导电性非晶膜
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摘要
PROBLEM TO BE SOLVED: To provide a simple method of manufacturing a transparent conductive amorphous film without using a high vacuum container, and also to provide the transparent conductive amorphous film having conductivity, transparency and surface smoothness equal to or higher than a film produced in a conventional sputtering method.SOLUTION: The method of manufacturing the transparent conductive amorphous film containing zinc and tin elements includes spraying mist solution or dispersion liquid containing zinc and tin compounds onto a heated substrate to form the film.
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