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Wire bonding apparatus, bonding tool exchange method and program for wire bonding apparatus

机译:引线键合装置,引线键合装置的更换方法及程序

摘要

A wire bonding apparatus, a method of exchanging a bonding tool of the same, and a computer readable record medium are provided to continuously perform bonding process while exchanging a bonding tool during the bonding process. A bonding arm(13) has a chuck(18a) installed on a front end thereof for holding a bonding tool which is moved to or from a bonding surface in an arc manner. The chuck is opened and closed by a chuck opening/closing unit. A bonding tool attaching/detaching unit(31) has a holding part(31a) holding the bonding tool and a driving part linearly moving the holding part in an axial direction of the chuck. The bonding tool attaching/detaching unit attaches or detaches the bonding tool to or from the chuck in cooperation with the chuck opening/closing unit.
机译:提供了引线键合设备,其键合工具的更换方法以及计算机可读记录介质,以在键合过程中更换键合工具的同时连续地执行键合过程。接合臂(13)具有安装在其前端的卡盘(18a),用于保持接合工具,该接合工具以弧形方式移入或移出接合表面。卡盘由卡盘开/关单元打开和关闭。接合工具装卸单元(31)具有:保持部(31a),其保持所述接合工具;以及驱动部,其使所述保持部在所述卡盘的轴向上直线移动。结合工具附接/分离单元与卡盘打开/关闭单元协作将结合工具附接至卡盘或从卡盘分离。

著录项

  • 公开/公告号JP4700595B2

    专利类型

  • 公开/公告日2011-06-15

    原文格式PDF

  • 申请/专利权人 株式会社新川;

    申请/专利号JP20060326456

  • 发明设计人 上田 尚;瀬山 耕平;金崎 信彦;

    申请日2006-12-04

  • 分类号H01L21/60;

  • 国家 JP

  • 入库时间 2022-08-21 18:20:28

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