Halftone phase shift photomask, blank for halftone phase shift photomask, and method for manufacturing halftone phase shift photomask

摘要

A blank for halftone phase shift photomask is disclosed. The blank has a transparent substrate, a halftone phase shift layer and a light shielding film, the halftone phase shift layer and the light shielding film being layered in this order on the transparent substrate, and the 1 light shielding film is a single layered or multiple layered film which has a layer of tantalum. IMAGE