Vacuum deposition method, and for vacuum deposition sealed evaporation source equipment

摘要

Vacuum deposition method is provided. It evaporates and distils evaporation material (22) in vacuum deposition, which heats the blowing holes (14) of container (11) and one passes through radiant heat from inner surface for evaporating vapor deposition material. In clamper (15) clamping zone evaporation vapor deposition material will not interference assessment since heatconduction is from above-mentioned heating container (11). Therefore, the steam of generation distributes the outside for entering deposition subject surface container from blowing holes (14).