Exposure manner of the exposure device of the panel substrate for display and the panel substrate for display, and the chuck containment the production mannered null substrate

摘要

PPROBLEM TO BE SOLVED: To reduce the weight of a chuck and to improve the flatness of the chuck. PSOLUTION: A plurality of spokes 13 are mounted on the base plate 12 of a chuck supporting stand 11 radially from the center of the base plate 12. Rims 14 are mounted on the tips of the respective spokes 13 and the adjacent rims 14 are connected to each other to form frames of a polygonal shape. A number of ball pins 15 are disposed atop the spokes 12 and the rims 14. Balls are rotatably mounted on the tips of the respective ball pins 15. A chuck 10 is mounted on the balls of the ball pins 15 and the chuck supporting stand 11 supports the chuck 10 at a number of points. The bottom ends of the ball pins 15 are fastened to the spokes 13 or the rims 14 by screwing. By turning the screws, the ball pins 15 are moved up and down and the heights of the respective points at which the balls of the ball pins 15 support the chuck 10 are adjusted. PCOPYRIGHT: (C)2006,JPO&NCIPI