The Spatial Effects of Antenna Configuration in a Large Area Inductively Coupled Plasma System for Flat Panel Displays

摘要

Spatial distributions of plasma parameters such as electron density, electron temperature and electric potential were investigated using a commercial simulation software(COMSOLTM) to predict the effects of antenna configuration in a large area inductively coupled plasma(ICP) system for flat panel displays. Nine planar antenna sets were evenly placed above a ceramic window. While the electron density was influenced by both the input current and gas pressure, the electron temperature and electric potential were dominantly affected by the gas pressure.