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Semiconductor devices having active elements with raised semiconductor patterns and related methods of fabricating the same

机译:具有具有凸起的半导体图案的有源元件的半导体器件及其制造方法

摘要

A semiconductor device may include a semiconductor region of a semiconductor substrate wherein a P-N junction is defined between the semiconductor region and a bulk of the semiconductor substrate. An insulating isolation structure in the semiconductor substrate may surround sidewalls of the semiconductor region. An interlayer insulating layer may be on the semiconductor substrate, on the semiconductor region, and on the insulating isolation structure, and the interlayer insulating layer may have first and second spaced apart element holes exposing respective first and second portions of the semiconductor region. A first semiconductor pattern may be in the first element hole on the first exposed portion of the semiconductor region, and a second semiconductor pattern may be in the second element hole on the second exposed portion of the semiconductor region. A surface portion of the first semiconductor pattern opposite the semiconductor substrate and a surface portion of the second semiconductor pattern opposite the semiconductor substrate may have a same conductivity type. Related methods are also discussed.
机译:半导体器件可以包括半导体衬底的半导体区域,其中在半导体区域和半导体衬底的主体之间限定P-N结。半导体衬底中的绝缘隔离结构可以围绕半导体区域的侧壁。层间绝缘层可以在半导体基板上,在半导体区域上以及在绝缘隔离结构上,并且层间绝缘层可以具有暴露半导体区域的相应的第一部分和第二部分的第一间隔开的元件孔和第二间隔开的元件孔。第一半导体图案可以在半导体区域的第一暴露部分上的第一元件孔中,并且第二半导体图案可以在半导体区域的第二暴露部分上的第二元件孔中。与半导体衬底相对的第一半导体图案的表面部分和与半导体衬底相对的第二半导体图案的表面部分可以具有相同的导电类型。还讨论了相关方法。

著录项

  • 公开/公告号US7923810B2

    专利类型

  • 公开/公告日2011-04-12

    原文格式PDF

  • 申请/专利权人 DAE-WON HA;SANG-YOON KIM;

    申请/专利号US20080288280

  • 发明设计人 SANG-YOON KIM;DAE-WON HA;

    申请日2008-10-17

  • 分类号H01L21/70;

  • 国家 US

  • 入库时间 2022-08-21 18:11:14

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