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Methods for forming micro-texture on an air bearing surface of a magnetic read/write slider and a magnetic read/write slider with micro-texture
Methods for forming micro-texture on an air bearing surface of a magnetic read/write slider and a magnetic read/write slider with micro-texture
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机译:在磁读/写滑块和具有微纹理的磁读/写滑块的空气轴承表面上形成微纹理的方法
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摘要
A method for forming micro-texture on an air bearing surface of a magnetic read/write slider, includes: positioning sliders arranged in arrays on a tray, each slider having a pole tip facing upward; loading the tray into a processing chamber, which is then evacuated to a preset pressure; and introducing a processing gas containing oxygen into the processing chamber; exposing the sliders to etch the surface of the slider so as to form a clear two-step structure thereon.
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