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Semiconductor substrate with islands of diamond and resulting devices

机译:带有金刚石岛的半导体衬底和所得器件

摘要

Disclosed is a method of forming a substrate having islands of diamond (or other material, such as diamond-like carbon), as well as integrated circuit devices formed from such a substrate. A diamond island can form part of the thermal solution for an integrated circuit formed on the substrate, and the diamond island can also provide part of a stress engineering solution to improve performance of the integrated circuit. Other embodiments are described and claimed.
机译:公开了一种形成具有金刚石岛(或其他材料,例如类金刚石碳)的衬底的方法,以及由这种衬底形成的集成电路器件。金刚石岛可以形成用于在衬底上形成的集成电路的热解决方案的一部分,并且金刚石岛还可以提供应力工程解决方案的一部分以改善集成电路的性能。描述和要求保护其他实施例。

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