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Semiconductor substrate with islands of diamond and resulting devices
Semiconductor substrate with islands of diamond and resulting devices
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机译:带有金刚石岛的半导体衬底和所得器件
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摘要
Disclosed is a method of forming a substrate having islands of diamond (or other material, such as diamond-like carbon), as well as integrated circuit devices formed from such a substrate. A diamond island can form part of the thermal solution for an integrated circuit formed on the substrate, and the diamond island can also provide part of a stress engineering solution to improve performance of the integrated circuit. Other embodiments are described and claimed.
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