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Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology
Environment friendly methods and systems for template cleaning and reclaiming in imprint lithography technology
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机译:压印光刻技术中用于模板清洁和回收的环保方法和系统
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摘要
Cleaning and reclaiming nano-imprint templates using environment friendly methods and systems is disclosed. A template may be cleaned by a combination of exposure to activated gaseous species followed by rinsing with oxygenated or hydrogenated DI water and exposure to reactive plasma to remove organic contaminant. Contaminant may be removed by forming a coating film of a water soluble polymer on the template and then peeling off the coating film. Organic residue from the film may be removed using oxygenated plasma.
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